Immigration lawyer Tia Smith said in an email that the rapper, whose given name is She'yaa Bin Abraham-Joseph, was released Wednesday on $100,000 USA bond.
The plane was taking them back to Atlanta to be reunited with family.
It came after he was granted bond by an immigration judge on Tuesday.
The statement reads: 'For the past 9 long days, on behalf of She'yaa Bin Abraham Joseph, known to the world as 21 Savage, have been speaking with ICE to both clarify his legal standing, his eligibility for bond, and provide evidence of his extraordinary contributions to his community and society.
They also said he has a pending application for a U visa - for victims of crimes who have faced mental or physical abuse in the United States - that was filed "as a result of being the victim of a deadly shooting in 2013" - and that his three USA citizen children make him eligible for deportation relief. In 2014, 21 Savage was convicted of felony drug charges, but as members of the rapper's legal team have since stated publicly, those charges were later vacated.
"Today, 21 Savage was granted a release on bond".
He was nominated for two awards at the Grammys, including record of the year for "Rockstar" alongside Post Malone. And he asks for your hearts and minds to be with them'.
ICE has shifted its focus to 21's expired visa.
His arrest prompted outcry from other musicians with Kendrick Lamar, DJ Khaled, Cardi B and SZA all backing the young rapper.